E Catalogue

Field of application In many leading-edge industries the equipment and process requirements are becoming more demanding. Sub-micron, nano or even angstrom resolution is becoming a common customer requirement. Due to facility and on-site conditions, e.g. floor vibration, these resolutions are very hard to reach. High-end microscopes, metrology, inspection and repair equipment as well as other sensitive tools in the semiconductor industry, micro- biology and scientific research will not perform to specification without adequate vibration isolation. Isolated platforms are used when the equipment does not have an internal vibration isolation system or when the internal system is not effective enough in isolating the external vibration. System design Based on customer requirements of isolation performance and on-site conditions, BILZ can design and build customize systems using cost-effective passive isolators with mechanical level control or for high-end requirements the cutting-edge active AIS™ isolation system in 6 degrees of freedom. The platforms are customized and optimized in terms of rigidity, weight, dimensions, center-of-gravity, and choice of isolators according to customer requirements. Results Depending on the customer requirements, floor conditions and system design of the isolated platforms, BILZ will enable your machine to meet vibration criteria of VC-D (<6 μ m/s) and VC- E (<3 μ m/s). This allows our customers to reach specification from nano to sub-angstrom resolution. D. Platform for minimum working height and very low center of gravity C. Platform for minimum working height and low center of gravity 39 Active Isolation System AIS™