E Catalogue

Range of application BILZ-Testfields ComPASS PRO Wafer inspection machine Flat Panel Machine Lab table with active isolation Active Isolation System AIS™ AIS™ has two primary functions: Active electro-pneumatic vibration isolation providing control in six degrees of freedom. Optimal vibration isolation performance without any amplification at resonance. Excellent level accuracy in both the vertical and horizontal plane. Minimal deflection and settling time after an acceleration or deceleration of a moving mass within the machine, shorter settling times equals greater machine throughput. Very efficient realtime control. PLC, CAN-Bus, one Controller and one High Speed electro-pneumatic servovalve for each degree of freedom. Each Controller consists of a microprocessor and integrated, high resolution sensors for position, air-pressure and acceleration. Easy-to-use, intelligent WinSNI-Software for setting up and optimizing the AIS™ and for providing system diagnostics. Two different modes of operation can be selected simply using a digital I/O. For example, scanning mode (during sensitive machine operations) to loading mode (during moving mass within the machine). Feedforward-signal is not required from the machine controller. No disturbing heat generation, magnetic variations or high electrical power consumption as by electromagnetic actuators / linear motors. Optimal vibration isolation performance for machines with high dynamic forces that are performing sensitive measurements and inspections, lithography equipment, laser machines, high resolution electron microscopes and machinery for the semiconductor industry. The AIS™ is utilized when the efficiency of isolation and the settling time of conventional air-springs with electro-pneumatic leveling systems is insufficient. One function is to protect the precision machine from floor vibration. The other primary function is to improve the performance of the machine by minimizing structure borne vibration created by the high dynamic forces produced during an acceleration or deceleration of a moving mass within the machine. In addition, settling time is reduced which minimizes the delay time before the machine can start performing its sensitive operation. Acceleration sensor (resolution 8 μ g) RS232 Diagnosis and Updates Sensor for position (resolution 0,2 μ m) Air-pressure sensor (resolution 0,2 mbar) CAN Bus (1MBaud) Servovalve MPYE Controller SPC-LC Microprocessor